THE PROBLEMS OF MONITORING AND CONTROL OF MICROCLIMATE PARAMETERS IN THE MICROELECTRONICS INDUSTRY
K.Y. Gusev, D.V. Zhiltsov, V.L. Burkovsky, P.Y. Gusev
Currently, more and more attention in the strategic planning of industrial development in Russia is paid to enterprises working in the field of microelectronics. This is confirmed by a large number of conferences, forums and meetings at the highest state level on the development of microelectronics in Russia. The main part of the enterprises producing microelectronic products began their work in the Soviet period. That is, today there are production shops, which in their size and characteristics do not coincide with modern production lines of microelectronic products. The article presents the influence of microclimate parameters on the quality of products. Both the characteristics of the air entering and leaving the premises and the electrostatic characteristics undoubtedly affecting the production of microelectronics and often leading to marriage, as well as the parameters of the water used in the production are considered. The result of the review of the current level of control in the microelectronic industry described above parameters is the formulation of problems – the lack of a systematic approach in the formulation of technical specifications, the development of all stages of the project and the construction or reconstruction of the microelectronic industry in the key management parameters of the microclimate shop, electrostatic parameters and characteristics of industrial water and gas.
Keywords: control, microelectronic industry, control of parameters